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Angular velocity detector
- Source :
- The Journal of the Acoustical Society of America. 123:1821
- Publication Year :
- 2008
- Publisher :
- Acoustical Society of America (ASA), 2008.
-
Abstract
- An angular velocity detector includes an angular velocity detecting element having a vibrating body arranged in a base substrate to be vibrated on a surface horizontal with respect to the base substrate. The angular velocity detecting element detects an angular velocity around an axis perpendicular to the base substrate based on a vibration of the vibrating body. In the angular velocity detector, a circuit substrate is bonded to a first surface of the base substrate through an adhesive, and a second surface of the angular velocity detecting element is electrically connected to the circuit substrate through a bonding wire. Furthermore, the adhesive is partially arranged on the first surface of the base substrate at least at a portion corresponding to a bonding portion of the bonding wire on the second surface of the base substrate. Therefore, a wire bonding can be easily accurately performed.
Details
- ISSN :
- 00014966
- Volume :
- 123
- Database :
- OpenAIRE
- Journal :
- The Journal of the Acoustical Society of America
- Accession number :
- edsair.doi...........e6fa3063f12b798e77d61471b0a7fa67