In-Zn-Sn-O thin film based transistor with high-k HfO2 dielectric

Subjects

Subjects :

Materials Chemistry
Metals and Alloys
Surfaces and Interfaces
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :

00406090

Volume :

753

Database :

OpenAIRE

Journal :

Thin Solid Films

Accession number :

edsair.doi...........e84e50d492b52ed8b1cf39642715adc8

Full Text :

https://doi.org/10.1016/j.tsf.2022.139290