Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

MLA

Sylvain Petitgrand, and Alain Bosseboeuf. “Characterization of the Static and Dynamic Behaviour of M(O)EMS by Optical Techniques: Status and Trends.” Journal of Micromechanics and Microengineering, vol. 13, June 2003, pp. S23–33. EBSCOhost, https://doi.org/10.1088/0960-1317/13/4/304.

APA

Sylvain Petitgrand, & Alain Bosseboeuf. (2003). Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends. Journal of Micromechanics and Microengineering, 13, S23–S33. https://doi.org/10.1088/0960-1317/13/4/304

Chicago

Sylvain Petitgrand, and Alain Bosseboeuf. 2003. “Characterization of the Static and Dynamic Behaviour of M(O)EMS by Optical Techniques: Status and Trends.” Journal of Micromechanics and Microengineering 13 (June): S23–33. doi:10.1088/0960-1317/13/4/304.