AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8 GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q ∼ 104 has been found at 6–7 GHz band.