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Effect of Additives on Direct Copper Electrodeposition on Transition Metal Diffusion Barriers for Silicon-based Integrated Devices

Authors :
Byoungyong Im
Sunjung Kim
Source :
ECS Meeting Abstracts. :2736-2736
Publication Year :
2012
Publisher :
The Electrochemical Society, 2012.

Abstract

not Available.

Details

ISSN :
21512043
Database :
OpenAIRE
Journal :
ECS Meeting Abstracts
Accession number :
edsair.doi...........edb4194aad32e2fdb1132d9f0b3bdd45
Full Text :
https://doi.org/10.1149/ma2012-02/34/2736