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Low-Temperature Direct Growth of Amorphous Boron Nitride Films for High-Performance Nanoelectronic Device Applications
- Source :
- ACS Applied Materials & Interfaces. 15:7274-7281
- Publication Year :
- 2023
- Publisher :
- American Chemical Society (ACS), 2023.
- Subjects :
- General Materials Science
Subjects
Details
- ISSN :
- 19448252 and 19448244
- Volume :
- 15
- Database :
- OpenAIRE
- Journal :
- ACS Applied Materials & Interfaces
- Accession number :
- edsair.doi...........edd9cbc1bdad392145c4456fb1c7930f
- Full Text :
- https://doi.org/10.1021/acsami.2c18706