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0.13μm Low-K/Cu Logic CMOS Based Technology for High Performance Analog Devices
- Source :
- Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2003
- Publisher :
- The Japan Society of Applied Physics, 2003.
- Subjects :
- Materials science
CMOS
business.industry
Optoelectronics
business
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........ee2fc6d63430cd494c805e6a1a7c6deb
- Full Text :
- https://doi.org/10.7567/ssdm.2003.a-8-4