Magnetron Sputtering Deposition of Vanadium Oxide With High TCR

Authors :: A Zhukova Svetlana
Ivanov Sergei Yu.
E Turkov Vladimir
A O Shumilin
A Ulyanov Sergei
D A Erastov
A Demin Sergei
V Troshin Bogdan
Source :: Nanoindustry Russia. :542-543
Publication Year :: 2018
Publisher :: Technosphera JSC, 2018.

Subjects :: Materials science
Chemical engineering
Sputter deposition
Deposition (chemistry)
Vanadium oxide

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