Measurement and Analysis of Glass Interposer Power Distribution Network Resonance Effects on a High-Speed Through Glass Via Channel

In this paper, we measured and analyzed glass interposer power distribution network (PDN) resonance effects on a high-speed through glass via (TGV) channel for the first time. To verify the glass interposer PDN resonance effects on the TGV channel, glass interposer test vehicles were fabricated. With these test vehicles, glass interposer PDN impedance, channel loss, far-end crosstalk, and eye diagram are measured. Based on these measurements, glass interposer PDN resonance effects on the signal integrity of the high-speed TGV channel are analyzed. Due to low loss of the glass substrate, sharp high PDN impedance peaks are generated at the resonance frequencies. High PDN impedance peaks at the PDN resonance frequencies, which affect return current of the TGV channel, increase channel loss, crosstalks, and PDN noise coupling in the frequency domain and degrade eye diagram in the time domain. To suppress these glass interposer PDN resonance effects, a ground shielded-TGV scheme is proposed. The proposed ground shielded-TGV scheme includes two ground TGVs $200\;{{\mu \text{m}}}$ away from the signal TGV considering the design rules and includes package ground underneath the glass interposer. Effectiveness of the suggested grounding scheme on the resonance effects suppression is verified with three-dimensional electromagnetic simulation. The proposed shielded-TGV design successfully suppressed the glass interposer PDN resonance effects that results in the suppression of insertion loss, shielding of the crosstalk, and improvement of the eye diagram of the high-speed TGV channel.