Contribution to the Study of the Dielectric Properties of WO3 Thin Films: Effect of Oxygen Adsorption

The aim of this work is to study the dielectric properties of thin films of tungsten trioxide. WO3 is an interesting material in the field of gas sensors. Here, we investigate the dependence of the electrical conductivity with temperature as well as the effect of the pressure on the thermal activation energy. For this purpose, we have used Impedance Spectroscopy (IS) to study the dielectric properties of RF sputtered WO3 thin films. Particularly, we have emphasized the effect of oxygen pressure on the surface conductivity.