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A new high-precision device for one-dimensional grating period measurement

Authors :
YuDa Chen
Changhe Zhou
YiHan Wang
XingXue Li
Wei Jia
Jin Wang
Source :
Holography, Diffractive Optics, and Applications XII.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Holography, Diffractive Optics, and Applications XII
Accession number :
edsair.doi...........ef148bcdcca829b3de9d63fa166be6a8

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