Transformation of crystalline structure and photoelectric properties in VO2/glass thin films by inserting TiO2 buffer layers

Vanadium dioxide (VO2) with reversible metal–insulator transition (MIT) is a promising energy-saving material for next-generation smart windows and infrared devices. However, the specific applications are largely limited by controllable preparation with different polymorphs on common glass substrates. Herein, VO2 thin films were prepared on transparent amorphous glass substrates by inserting TiO2 buffer layers using pulsed laser deposition (PLD) technique. The results showed that B-VO2 film would be formed on the amorphous glass substrate at 400 °C. While after inserting TiO2 buffer layer, pure M-VO2 films with clear phase transition properties were obtained. Based on the analysis of X-ray Diffraction (XRD) and Energy Dispersive Spectrometer (EDS) characterization, the crystalline transformation was attributed to the template effect of TiO2 layer and Ti ions diffusion. The characteristics of VO2/TiO2/glass thin films were closely associated with the thickness of TiO2 buffer layer. With 60 nm TiO2 buffer layer, the VO2/TiO2/glass film showed the sharpest resistance change with more than 2.5-order of magnitude across the MIT, and the T-vis value is as high as 53% with the ΔTsol up to 5.2%. Our current results demonstrated the importance of TiO2 buffer layer to the formation of M-VO2 film on amorphous glass substrate, which was very meaningful for the production of energy efficient smart windows in the future.