Qualification of aerial image 193nm inspection tool for all masks and all process steps

MLA

Dan Rost, et al. “Qualification of Aerial Image 193nm Inspection Tool for All Masks and All Process Steps.” SPIE Proceedings, May 2008. EBSCOhost, https://doi.org/10.1117/12.793096.

APA

Dan Rost, Dax Olvera, Christophe Couderc, Ryan Gardner, Raunak Mann, Simon Kurin, & Dana Bernstein. (2008). Qualification of aerial image 193nm inspection tool for all masks and all process steps. SPIE Proceedings. https://doi.org/10.1117/12.793096

Chicago

Dan Rost, Dax Olvera, Christophe Couderc, Ryan Gardner, Raunak Mann, Simon Kurin, and Dana Bernstein. 2008. “Qualification of Aerial Image 193nm Inspection Tool for All Masks and All Process Steps.” SPIE Proceedings, May. doi:10.1117/12.793096.