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Soft mold and gasbag pressure mechanism for patterning submicron patterns onto a large concave substrate
- Source :
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:1724
- Publication Year :
- 2006
- Publisher :
- American Vacuum Society, 2006.
-
Abstract
- A gasbag pressure (GBP) mechanism has been developed for patterning submicron patterns onto large concave substrate. The GBP mechanism consists of a pressure gasbag and a vacuum chamber system. It provides gradual contact, uniform pressure, and intact contact for imprinting patterns in the soft mold onto a concave substrate. The patterns on the soft mold can be successfully replicated over an entire photoresist-coated concave substrate. The accuracy of replication has been experimentally evaluated.
Details
- ISSN :
- 10711023
- Volume :
- 24
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Accession number :
- edsair.doi...........f1b63e02bc8ebd0988a8bdda1f51231f