Fabricating a High Aspect Ratio Ferromagnetic Core 3D Micro-inductor Using MEMS Technology

Authors :: E Turkov Vladimir
A Zhukova Svetlana
Obizhaev Denis Yu.
A Baranov Alexander
Source :: Nanoindustry Russia. :511-511
Publication Year :: 2018
Publisher :: Technosphera JSC, 2018.

Subjects :: Microelectromechanical systems
Core (optical fiber)
Materials science
Aspect ratio
Ferromagnetism
Inductor
Engineering physics

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