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Defect detection of micro-cantilever beams based on optical coherence vibrometer system

Authors :
Zhong Shuncong
Zhang Qiukun
Jia Meiying
Zhou Ning
Lin Jiewen
Source :
Journal of Applied Optics. 42:304-309
Publication Year :
2021
Publisher :
Journal of Applied Optics, 2021.

Subjects

Subjects :
Physics
Cantilever
Optics
business.industry
Coherence (statistics)
business
Laser Doppler vibrometer
Atomic and Molecular Physics, and Optics

Details

ISSN :
10022082
Volume :
42
Database :
OpenAIRE
Journal :
Journal of Applied Optics
Accession number :
edsair.doi...........f38ab49181b05165776ec1b95b2d9c21

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