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Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning
- Source :
- Sensors and Actuators A: Physical. 343:113678
- Publication Year :
- 2022
- Publisher :
- Elsevier BV, 2022.
Details
- ISSN :
- 09244247
- Volume :
- 343
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators A: Physical
- Accession number :
- edsair.doi...........f417ffec6d6d476c72672ccfebbedbaf