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Determination of Si wafer resistivity distributions by C-V measurements
- Source :
- Proceedings of 9th International Conference on Large Scale Applications and Radiation Hardness of Semiconductor Detectors — PoS(RD09).
- Publication Year :
- 2010
- Publisher :
- Sissa Medialab, 2010.
Details
- Database :
- OpenAIRE
- Journal :
- Proceedings of 9th International Conference on Large Scale Applications and Radiation Hardness of Semiconductor Detectors — PoS(RD09)
- Accession number :
- edsair.doi...........f5157d36d2a1c52e7a46ec21dfbaadf6
- Full Text :
- https://doi.org/10.22323/1.098.0016