Method to Determine the Root Cause of Low- $\kappa$ SiCOH Dielectric Failure Distributions

MLA

Patrick Justison, et al. “Method to Determine the Root Cause of Low- $\kappa$ SiCOH Dielectric Failure Distributions.” IEEE Electron Device Letters, vol. 38, Jan. 2017, pp. 119–22. EBSCOhost, https://doi.org/10.1109/led.2016.2631718.

APA

Patrick Justison, Toh-Ming Lu, Sean P. Ogden, Tian Shen, Kong Boon Yeap, & Joel L. Plawsky. (2017). Method to Determine the Root Cause of Low- $\kappa$ SiCOH Dielectric Failure Distributions. IEEE Electron Device Letters, 38, 119–122. https://doi.org/10.1109/led.2016.2631718

Chicago

Patrick Justison, Toh-Ming Lu, Sean P. Ogden, Tian Shen, Kong Boon Yeap, and Joel L. Plawsky. 2017. “Method to Determine the Root Cause of Low- $\kappa$ SiCOH Dielectric Failure Distributions.” IEEE Electron Device Letters 38 (January): 119–22. doi:10.1109/led.2016.2631718.