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Effect of potassium persulfate on chemical mechanical planarization of Cu/Ni microstructures for MEMS

Authors :
Mao Sun
Liang Jiang
Yuan Wu
Yushan Chen
Qiuyu Li
Linmao Qian
Source :
Microelectronic Engineering. 275:111979
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Subjects

Subjects :
Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :
01679317
Volume :
275
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........f62099f00972347edef7447b071228c6

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