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Effect of potassium persulfate on chemical mechanical planarization of Cu/Ni microstructures for MEMS
- Source :
- Microelectronic Engineering. 275:111979
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- ISSN :
- 01679317
- Volume :
- 275
- Database :
- OpenAIRE
- Journal :
- Microelectronic Engineering
- Accession number :
- edsair.doi...........f62099f00972347edef7447b071228c6