Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method

Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150nm in the vertical direction ×110nm in the horizontal direction has been achieved at an x-ray energy of 12keV. A focused beam size of smaller than 300nm is obtained within an x-ray energy range of 8–28keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.