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Development of Extreme High Vacuum by Using Open Pumping System with Dual Diffusion Pumps in Tandem and Titanium Sublimation Pump
- Source :
- SHINKU. 35:438-441
- Publication Year :
- 1992
- Publisher :
- The Vacuum Society of Japan, 1992.
Details
- ISSN :
- 18809413 and 05598516
- Volume :
- 35
- Database :
- OpenAIRE
- Journal :
- SHINKU
- Accession number :
- edsair.doi...........f8d80e91815699ef815155c45d7df63c
- Full Text :
- https://doi.org/10.3131/jvsj.35.438