An electron imaging approach to soft‐x‐ray transmission spectromicroscopy

We tested a new soft‐x‐ray transmission spectromiscropy technique on the Aladdin storage ring at the Wisconsin Synchrotron Radiation Center. Transmitted x rays were converted with a photocathode into photoelectrons, which were subsequently electron‐optically processed by an x‐ray secondary electron‐emission microscope producing submicron‐resolution images. Test images demonstrated the excellent contrast due to the chemical differences between silicon features and a silicon nitride substrate. We also obtained x‐ray transmission versus photon energy curves for microscopic specimen areas.