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Impact of High-Temperature Annealing on Interfacial Layers Grown by O2 Plasma on Si0.5Ge0.5 Substrates

Authors :
Meng-Chien Lee
Hung-Ru Lin
Wei-Li Lee
Nien-Ju Chung
Guang-Li Luo
Chao-Hsin Chien
Source :
IEEE Transactions on Electron Devices. 69:1265-1270
Publication Year :
2022
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2022.

Details

ISSN :
15579646 and 00189383
Volume :
69
Database :
OpenAIRE
Journal :
IEEE Transactions on Electron Devices
Accession number :
edsair.doi...........f90fbf306cb4a2d94596c220ab9071ca