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Plasma fireball-mediated ion implantation for nonvolatile memory application

Authors :
null Sudheer
Vivek Pachchigar
Biswarup Satpati
Sooraj KP
Sebin Augustine
Sukriti Hans
Mukesh Ranjan
Source :
Applied Surface Science. 607:154999
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Subjects

Subjects :
General Physics and Astronomy
Surfaces and Interfaces
General Chemistry
Condensed Matter Physics
Surfaces, Coatings and Films

Details

ISSN :
01694332
Volume :
607
Database :
OpenAIRE
Journal :
Applied Surface Science
Accession number :
edsair.doi...........f9295fe423407f6ba5e2769518cb6ba9
Full Text :
https://doi.org/10.1016/j.apsusc.2022.154999
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