Tungsten nanostructured thin films obtained via HFCVD

MLA

O. Goiz, et al. “Tungsten Nanostructured Thin Films Obtained via HFCVD.” Nanostructured Thin Films IV, Sept. 2011. EBSCOhost, https://doi.org/10.1117/12.893850.

APA

O. Goiz, G. F. Pérez-Sánchez, C. Felipe, R. Peña-Sierra, N. Morales, J. G. Ortega-Mendoza, P. Zaca-Morán, & F. Chávez. (2011). Tungsten nanostructured thin films obtained via HFCVD. Nanostructured Thin Films IV. https://doi.org/10.1117/12.893850

Chicago

O. Goiz, G. F. Pérez-Sánchez, C. Felipe, R. Peña-Sierra, N. Morales, J. G. Ortega-Mendoza, P. Zaca-Morán, and F. Chávez. 2011. “Tungsten Nanostructured Thin Films Obtained via HFCVD.” Nanostructured Thin Films IV, September. doi:10.1117/12.893850.