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Surface smoothing of indium tin oxide film by laser-induced photochemical etching
- Source :
- Japanese Journal of Applied Physics. 56:128003
- Publication Year :
- 2017
- Publisher :
- IOP Publishing, 2017.
-
Abstract
- Surface smoothing of indium tin oxide (ITO) film by laser irradiation was demonstrated. The ITO surface was etched by choline radicals, which were activated by laser irradiation at a wavelength of 532 nm. The RMS surface roughness was improved from 5.6 to 4.6 nm after 10 min of laser irradiation. We also showed the changes in the surface morphology of the ITO film with various irradiation powers and times.
- Subjects :
- 010302 applied physics
Materials science
Physics and Astronomy (miscellaneous)
Radical
General Engineering
General Physics and Astronomy
02 engineering and technology
021001 nanoscience & nanotechnology
Laser
Photochemistry
digestive system
01 natural sciences
law.invention
Indium tin oxide
Wavelength
Etching (microfabrication)
law
0103 physical sciences
Surface roughness
Irradiation
Reactive-ion etching
0210 nano-technology
Subjects
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 56
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........fc990ce0ebd5b6d4d314c8f541b88359
- Full Text :
- https://doi.org/10.7567/jjap.56.128003