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Single‐Ion Implantation: Position‐Controlled Functionalization of Vacancies in Silicon by Single‐Ion Implanted Germanium Atoms (Adv. Funct. Mater. 21/2021)
- Source :
- Advanced Functional Materials. 31:2170151
- Publication Year :
- 2021
- Publisher :
- Wiley, 2021.
Details
- ISSN :
- 16163028 and 1616301X
- Volume :
- 31
- Database :
- OpenAIRE
- Journal :
- Advanced Functional Materials
- Accession number :
- edsair.doi...........fcc0af6d4a3899fef12b5467aa0bc981
- Full Text :
- https://doi.org/10.1002/adfm.202170151