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Single‐Ion Implantation: Position‐Controlled Functionalization of Vacancies in Silicon by Single‐Ion Implanted Germanium Atoms (Adv. Funct. Mater. 21/2021)

Authors :
Nicola Manini
Nguyen H. Le
Guido Fratesi
Marco Turchetti
Giovanni Onida
Giorgio Ferrari
Enrico Prati
Simona Achilli
Takashi Tanii
Takahiro Shinada
Source :
Advanced Functional Materials. 31:2170151
Publication Year :
2021
Publisher :
Wiley, 2021.

Details

ISSN :
16163028 and 1616301X
Volume :
31
Database :
OpenAIRE
Journal :
Advanced Functional Materials
Accession number :
edsair.doi...........fcc0af6d4a3899fef12b5467aa0bc981
Full Text :
https://doi.org/10.1002/adfm.202170151