Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

MLA

Yuji Awano, et al. “Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition.” Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials, Jan. 2007. EBSCOhost, https://doi.org/10.7567/ssdm.2007.c-1-3.

APA

Yuji Awano, Shintaro Sato, Mariko Suzuki, Takashi Hyakushima, Tadashi Sakai, Masayuki Katagiri, Mizuhisa Nihei, & Naoshi Sakuma. (2007). Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition. Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials. https://doi.org/10.7567/ssdm.2007.c-1-3

Chicago

Yuji Awano, Shintaro Sato, Mariko Suzuki, Takashi Hyakushima, Tadashi Sakai, Masayuki Katagiri, Mizuhisa Nihei, and Naoshi Sakuma. 2007. “Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition.” Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials, January. doi:10.7567/ssdm.2007.c-1-3.