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Effect of different buffer layers and superlattice intermediate layers on GaAs/Si(001)
- Source :
- Scopus-Elsevier
- Publication Year :
- 2013
- Publisher :
- OSA, 2013.
-
Abstract
- The epitaxy of GaAs/Si(001) has been carried out via inserting different buffer layers and different SLSs by MOCVD. High quality epilayers were obtained by AlAs buffer layer and GaAs0.85P0.15/GaAs SLS.
Details
- Database :
- OpenAIRE
- Journal :
- Asia Communications and Photonics Conference 2013
- Accession number :
- edsair.doi.dedup.....06e762d8c89f73258092a3d65ca6905b