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Nanostructured TiO2 thin films prepared by supersonic beams and their application in a sensor array for the discrimination of VOC

Authors :
Pietro Siciliano
Salvatore Iannotta
L. Guerini
Simonetta Capone
T. Toccoli
A. Boschetti
Antonella M. Taurino
Source :
First IEEE International Conference on Sensors, pp. 647–650, Hyatt Orlando, FL, USA, June 12-14, 2002, info:cnr-pdr/source/autori:Boschetti, A.; Guerini, L.; Iannotta, S.; Capone, S.; Siciliano, P.; Taurino, A./congresso_nome:First IEEE International Conference on Sensors/congresso_luogo:Hyatt Orlando, FL, USA/congresso_data:June 12-14, 2002/anno:2002/pagina_da:647/pagina_a:650/intervallo_pagine:647–650, info:cnr-pdr/source/autori:Siciliano P., Toccoli T., Taurino A.M., Iannotta S., Boschetti A., Guerini L./congresso_nome:/congresso_luogo:/congresso_data:2003/anno:2003/pagina_da:/pagina_a:/intervallo_pagine
Publication Year :
2002
Publisher :
The Institute of Electrical and Electronics Engineers (IEEE), Piscataway, USA, 2002.

Abstract

In this paper, we present the first sensor ever built using films grown by supersonic beam of cluster oxides as sensing material. Supersonic cluster beams, produced by a pulsed micro-plasma cluster source have successfully used to prepare nanocrystalline thin films of TiO/sub 2/. The sensors, prepared by using different deposition parameters, were suitable for use in a gas sensor array for electronic nose. Sensors showed a quite good response to ethanol, methanol and propanol. Principal component analysis was used as method for testing the array capability in discrimination and recognition of the volatile compounds.

Subjects

Subjects :
Materials science
Electronic nose
business.industry
principal component analysis
VOC
Analytical chemistry
Supersonic cluster beam
Electrochemical gas sensor
Propanol
chemistry.chemical_compound
chemistry
Sensor array
'sensoi'kay
Cluster (physics)
Optoelectronics
Deposition (phase transition)
Supersonic speed
Thin film
business

Details

Language :
English
Database :
OpenAIRE
Journal :
First IEEE International Conference on Sensors, pp. 647–650, Hyatt Orlando, FL, USA, June 12-14, 2002, info:cnr-pdr/source/autori:Boschetti, A.; Guerini, L.; Iannotta, S.; Capone, S.; Siciliano, P.; Taurino, A./congresso_nome:First IEEE International Conference on Sensors/congresso_luogo:Hyatt Orlando, FL, USA/congresso_data:June 12-14, 2002/anno:2002/pagina_da:647/pagina_a:650/intervallo_pagine:647–650, info:cnr-pdr/source/autori:Siciliano P., Toccoli T., Taurino A.M., Iannotta S., Boschetti A., Guerini L./congresso_nome:/congresso_luogo:/congresso_data:2003/anno:2003/pagina_da:/pagina_a:/intervallo_pagine
Accession number :
edsair.doi.dedup.....09f826a61497cea8aaa58da137c52eb4

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