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A Novel Silicon Microstrip Termination Structure With All P-Type Multiguard and Scribe-Line Implants

Authors :
G.-F. Dalla Betta
P. Gregori
Giovanni Verzellesi
L. Bosisio
Maurizio Boscardin
S. Dittongo
Nicola Zorzi
I. Rachevskaia
Source :
Fondazione Bruno Kessler-IRIS

Abstract

A novel termination structure for silicon microstrip detectors is proposed, featuring all p-type multiguard and scribe-line implants, as well as inward metal field-plates providing almost complete coverage of the passivation-oxide external surface. The structure is intended for detector long-term stability improvement and fabrication-process simplification. Proper design of the multiguard layout enables a very stable behavior at relatively high bias voltages to be achieved both prior and after 1/spl times/10/sup 12/ cm/sup -2/ neutron irradiation.

Details

Database :
OpenAIRE
Journal :
Fondazione Bruno Kessler-IRIS
Accession number :
edsair.doi.dedup.....0ad667aa8145442c12de3691c11b2900