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A Novel Silicon Microstrip Termination Structure With All P-Type Multiguard and Scribe-Line Implants
- Source :
- Fondazione Bruno Kessler-IRIS
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Abstract
- A novel termination structure for silicon microstrip detectors is proposed, featuring all p-type multiguard and scribe-line implants, as well as inward metal field-plates providing almost complete coverage of the passivation-oxide external surface. The structure is intended for detector long-term stability improvement and fabrication-process simplification. Proper design of the multiguard layout enables a very stable behavior at relatively high bias voltages to be achieved both prior and after 1/spl times/10/sup 12/ cm/sup -2/ neutron irradiation.
- Subjects :
- Nuclear and High Energy Physics
termination structures
Materials science
Silicon
business.industry
Detector
Radiation detectors
silicon microstrip detectors
multiguard
chemistry.chemical_element
Line (electrical engineering)
Particle detector
Nuclear Energy and Engineering
chemistry
Electronic engineering
Optoelectronics
Neutron
Electrical and Electronic Engineering
business
Neutron irradiation
Silicon microstrip detectors
Voltage
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Fondazione Bruno Kessler-IRIS
- Accession number :
- edsair.doi.dedup.....0ad667aa8145442c12de3691c11b2900