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Dedicated oven for optical resonator heating process

Authors :
David Bassir
Yue Hao
Mikhail Zarubin
Patrice Salzenstein
Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST)
Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
École normale supérieure - Cachan (ENS Cachan)
Source :
SPIE/COS Photonics Asia, SPIE/COS Photonics Asia, Oct 2018, Beijing, China. ⟨10.1117/12.2500664⟩
Publication Year :
2018
Publisher :
SPIE, 2018.

Abstract

International audience; To improve the quality of optical resonator's fabrication, an important step consists in performing an annealing process up to 600°C. It improves the roughness of resonator's surface down to the nanometer scale. Concretely it helps in reducing stresses at the periphery of their surface thus allowing higher Q-factors. Mechanical treatments enable state-of-the art characteristics for the surface roughness. The design of an oven strongly depends on its ability to reach the desired annealing process. It is significantly improved thanks to nichrome resistant alloy wires and special chopped basalt fibers for thermal isolation. In addition to the experimental tests, and in order to get better understanding of the residual stresses inside the resonator, we have simulated the heating process in the oven using the finite element code ANSYS© and CFD fluid module. Thermal distribution at different times of the heating and for three different temperatures with the range of 600°C are described.

Details

Database :
OpenAIRE
Journal :
Optoelectronic Devices and Integration VII
Accession number :
edsair.doi.dedup.....0ad915c360cab11837e0dd686821c790
Full Text :
https://doi.org/10.1117/12.2500664