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Physical passivation of silicon surfaces

Authors :
Meixi Chen
Abhishek Iyer
David Angel
Jimmy Hack
Robert L Opila
Publication Year :
2020
Publisher :
American Chemical Society (ACS), 2020.

Details

Database :
OpenAIRE
Accession number :
edsair.doi.dedup.....0d80622ac11b783d86b502860b273782

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