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Near-Field Scanning Millimeter-wave Microscope Combined with a Scanning Electron Microscope
- Source :
- IEEE-Microwave-Theory-and-Techniques-Society International Microwave Symposium, IMS 2017, IEEE-Microwave-Theory-and-Techniques-Society International Microwave Symposium, IMS 2017, Jun 2017, Honolulu, HI, United States. pp.1656-1659
- Publication Year :
- 2017
- Publisher :
- HAL CCSD, 2017.
-
Abstract
- International audience; The design, fabrication and experimental validation of a novel near-field scanning millimeter-wave microscope (NSMM) built inside a scanning electron microscope (SEM) is presented. The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of a sample with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.
- Subjects :
- Conventional transmission electron microscope
Scanning Hall probe microscope
Microscope
Atomic de Broglie microscope
Materials science
business.industry
020208 electrical & electronic engineering
Scanning confocal electron microscopy
020206 networking & telecommunications
02 engineering and technology
law.invention
Scanning probe microscopy
[SPI]Engineering Sciences [physics]
Optics
law
0202 electrical engineering, electronic engineering, information engineering
Electron beam-induced deposition
business
Environmental scanning electron microscope
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- IEEE-Microwave-Theory-and-Techniques-Society International Microwave Symposium, IMS 2017, IEEE-Microwave-Theory-and-Techniques-Society International Microwave Symposium, IMS 2017, Jun 2017, Honolulu, HI, United States. pp.1656-1659
- Accession number :
- edsair.doi.dedup.....11902c83a28ca0247c90a6141e7a9fcf