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Flexible PVDF-TrFE pyroelectric sensor driven by polysilicon thin film transistor fabricated on ultra-thin polyimide substrate

Authors :
Antonio Minotti
Francesco Maita
Luca Maiolo
Alessandro Pecora
Source :
Sensors and actuators. A, Physical, 185 (2012): 39–43. doi:10.1016/j.sna.2012.07.013, info:cnr-pdr/source/autori:Pecora A, Maiolo L, Maita F, Minotti A/titolo:Flexible PVDF-TrFE pyroelectric sensor driven by polysilicon thin film transistor fabricated on ultra-thin polyimide substrate/doi:10.1016%2Fj.sna.2012.07.013/rivista:Sensors and actuators. A, Physical (Print)/anno:2012/pagina_da:39/pagina_a:43/intervallo_pagine:39–43/volume:185
Publication Year :
2012
Publisher :
Elsevier BV, 2012.

Abstract

In this work we present a flexible pyroelectric sensor composed by a PVDF-TrFE capacitor realized on ultra-thin polyimide film (5 mu m thick), integrated with a n-channel low temperature polysilicon thin film transistor also fabricated on ultra-thin polyimide (8 mu m thick). Exploiting a multi-foil approach, the pyroelectric capacitors and the transistors were attached one over the other reaching a final thickness of about 15 mu m. The bottom contact of the sensor capacitance was connected to the gate of the transistor by a silver ink, while, for bias and load resistances, we used external elements. The active sensor area was defined by a circular capacitor with a diameter of about 2 mm. In order to enhance PVDF-TrFE pyroelectric properties, an external stepwise voltage was applied to the structure up to values of 160 V at a temperature of about 80 degrees C. The devices were then tested, at different working frequencies (up to 800 Hz) under a specific infrared radiation provided by a He-Ne laser, with a wavelength of 632 nm and maximum power of 5 mW. An output signal of tens of millivolt was observed at 10 Hz, exploiting the pre-amplification of polysilicon thin film transistor.

Details

ISSN :
09244247
Volume :
185
Database :
OpenAIRE
Journal :
Sensors and Actuators A: Physical
Accession number :
edsair.doi.dedup.....126870084ef128cc342a6b84a0d6b304
Full Text :
https://doi.org/10.1016/j.sna.2012.07.013