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Flexible PVDF-TrFE pyroelectric sensor driven by polysilicon thin film transistor fabricated on ultra-thin polyimide substrate
- Source :
- Sensors and actuators. A, Physical, 185 (2012): 39–43. doi:10.1016/j.sna.2012.07.013, info:cnr-pdr/source/autori:Pecora A, Maiolo L, Maita F, Minotti A/titolo:Flexible PVDF-TrFE pyroelectric sensor driven by polysilicon thin film transistor fabricated on ultra-thin polyimide substrate/doi:10.1016%2Fj.sna.2012.07.013/rivista:Sensors and actuators. A, Physical (Print)/anno:2012/pagina_da:39/pagina_a:43/intervallo_pagine:39–43/volume:185
- Publication Year :
- 2012
- Publisher :
- Elsevier BV, 2012.
-
Abstract
- In this work we present a flexible pyroelectric sensor composed by a PVDF-TrFE capacitor realized on ultra-thin polyimide film (5 mu m thick), integrated with a n-channel low temperature polysilicon thin film transistor also fabricated on ultra-thin polyimide (8 mu m thick). Exploiting a multi-foil approach, the pyroelectric capacitors and the transistors were attached one over the other reaching a final thickness of about 15 mu m. The bottom contact of the sensor capacitance was connected to the gate of the transistor by a silver ink, while, for bias and load resistances, we used external elements. The active sensor area was defined by a circular capacitor with a diameter of about 2 mm. In order to enhance PVDF-TrFE pyroelectric properties, an external stepwise voltage was applied to the structure up to values of 160 V at a temperature of about 80 degrees C. The devices were then tested, at different working frequencies (up to 800 Hz) under a specific infrared radiation provided by a He-Ne laser, with a wavelength of 632 nm and maximum power of 5 mW. An output signal of tens of millivolt was observed at 10 Hz, exploiting the pre-amplification of polysilicon thin film transistor.
- Subjects :
- Materials science
TFTS
business.industry
Transistor
Metals and Alloys
Condensed Matter Physics
Capacitance
Signal
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
law.invention
Pyroelectricity
VINYLIDENE-FLUORIDE
Capacitor
LARGE-AREA
law
Thin-film transistor
Optoelectronics
Electrical and Electronic Engineering
business
Instrumentation
Polyimide
Voltage
Subjects
Details
- ISSN :
- 09244247
- Volume :
- 185
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators A: Physical
- Accession number :
- edsair.doi.dedup.....126870084ef128cc342a6b84a0d6b304
- Full Text :
- https://doi.org/10.1016/j.sna.2012.07.013