Back to Search
Start Over
Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films
- Source :
- Nanotechnology and Precision Engineering, Vol 2, Iss 4, Pp 163-168 (2019)
- Publication Year :
- 2019
- Publisher :
- AIP Publishing LLC, 2019.
-
Abstract
- A novel test structure to characterize the fracture strength of MEMS (Micro-electro-Mechanical Systems) thin films is presented. The test structure is comprised of a micro fabricated chevron-shaped thermal actuator and test specimen. The test structure is capable of producing large displacement and stress while keeping a relatively low temperature gradient across the test specimen. A voltage is applied across the beams of the chevron-shaped actuator, producing thermal expansion force to fracture the test specimen. Actuator deflection is computed based on elastic analysis of structures. To verify the test structure, simulations have been implemented using COMSOL Multiphysics. A 620 μm long, 410 μm wide, 10 μm thick test structure produced stress of 7.1 GPa while the applied voltage is 5 V. The results indicate that the test structure is suitable for in-situ measurement of the fracture strength of MEMS thin films. Keywords: MEMS thin films, Fracture strength, Chevron-shaped thermal actuator
- Subjects :
- Technology
Materials science
Multiphysics
02 engineering and technology
01 natural sciences
Industrial and Manufacturing Engineering
Thermal expansion
Stress (mechanics)
Flexural strength
Deflection (engineering)
0103 physical sciences
Composite material
Instrumentation
010302 applied physics
Microelectromechanical systems
Mechanical Engineering
010401 analytical chemistry
021001 nanoscience & nanotechnology
Engineering (General). Civil engineering (General)
0104 chemical sciences
Temperature gradient
Fracture (geology)
TA1-2040
0210 nano-technology
Actuator
Voltage
Subjects
Details
- Language :
- English
- ISSN :
- 25895540
- Volume :
- 2
- Issue :
- 4
- Database :
- OpenAIRE
- Journal :
- Nanotechnology and Precision Engineering
- Accession number :
- edsair.doi.dedup.....130fbefafb07b8465f7c8218af9a9b6a