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Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors
- Source :
- physica status solidi (RRL) - Rapid Research Letters. 10:420-425
- Publication Year :
- 2016
- Publisher :
- Wiley, 2016.
- Subjects :
- Materials science
SrTiO3
Low leakage
Capacitors
02 engineering and technology
Dielectric
01 natural sciences
law.invention
Atomic layer deposition
Stoichiometric dielectric
law
0103 physical sciences
Leakage current
Materials Science (all)
Condensed Matter Physics
General Materials Science
010302 applied physics
business.industry
021001 nanoscience & nanotechnology
Capacitor
Optoelectronics
Metal insulator metal capacitor
0210 nano-technology
business
Stoichiometry
Subjects
Details
- ISSN :
- 18626254
- Volume :
- 10
- Database :
- OpenAIRE
- Journal :
- physica status solidi (RRL) - Rapid Research Letters
- Accession number :
- edsair.doi.dedup.....14a63ac3a4d7552f5c6f60077b5d122b
- Full Text :
- https://doi.org/10.1002/pssr.201600036