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Plasma characterization of the gas-puff target source dedicated for soft X-ray microscopy using SiC detectors
- Source :
- Nukleonika, Vol 61, Iss 2, Pp 139-143 (2016)
- Publication Year :
- 2016
- Publisher :
- Walter de Gruyter GmbH, 2016.
-
Abstract
- An Nd:YAG pulsed laser was employed to irradiate a nitrogen gas-puff target. The interaction gives rise to the emission of soft X-ray (SXR) radiation in the ‘water window’ spectral range (λ= 2.3÷4.4 nm). This source was already successfully employed to perform the SXR microscopy. In this work, a Silicon Carbide (SiC) detector was used to characterize the nitrogen plasma emission in terms of gas-puff target parameters. The measurements show applicability of SiC detectors for SXR plasma characterization.
- Subjects :
- Risk
Plasma diagnostic technique
Nuclear and High Energy Physics
'Water-window'
EUV
Gas-pufftarget
SiC detector
Nuclear Energy and Engineering
Safety, Risk, Reliability and Quality
Waste Management and Disposal
Condensed Matter Physics
Instrumentation
‘water-window’
Science
Extreme ultraviolet lithography
Nanotechnology
01 natural sciences
010309 optics
0103 physical sciences
gas-puff target
010302 applied physics
Water window
business.industry
Detector
Plasma
Characterization (materials science)
Reliability and Quality
Optoelectronics
Soft x-ray microscopy
Safety
business
Subjects
Details
- ISSN :
- 00295922
- Volume :
- 61
- Database :
- OpenAIRE
- Journal :
- Nukleonika
- Accession number :
- edsair.doi.dedup.....18c0af4fe6f6ee231026035a6bf3c7e1
- Full Text :
- https://doi.org/10.1515/nuka-2016-0024