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Elucidation of electric characteristics for P and N type polycrystalline silicon vertical thin film transistors

Authors :
Peng Zhang
Emmanuel Jacques
Régis Rogel
Laurent Pichon
Olivier Bonnaud
Nanjing University of Posts and Telecommunications [Nanjing] (NJUPT)
Institut d'Électronique et des Technologies du numéRique (IETR)
Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes)
Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Nantes Université - pôle Sciences et technologie
Nantes Université (Nantes Univ)-Nantes Université (Nantes Univ)
Natural Science Foundation of Jiangsu Province [BK20180762]
NUPTSF [NY219099]
Source :
Journal of Physics D: Applied Physics, Journal of Physics D: Applied Physics, 2022, 55 (49), pp.495109. ⟨10.1088/1361-6463/ac9a58⟩
Publication Year :
2022
Publisher :
IOP Publishing, 2022.

Abstract

P and N type polycrystalline silicon has been applied in thin film transistors (TFTs) for driving a range of displays, and for building up complementary metal oxide semiconductor (CMOS)-like circuits. In one aspect, the high driving current is required, which is usually achieved by improving field effect mobility of the active layer. For another, balanced electrical characteristics are required for achieving CMOS-like logic circuits. In this article, in order to increase driving current, P and N type polycrystalline silicon vertical TFTs configuration is proposed that can get rid of the strict requirement of the field effect mobility in order to increase the driving current. In addition, the balanced electrical properties are demonstrated for P and N type vertical TFTs, which are elucidated by the density of states calculations. The simple Simulation Program with Integrated Circuit Emphasis (SPICE) modelling indicates the potential application in CMOS inverter based on our vertical TFTs.

Details

ISSN :
13616463 and 00223727
Volume :
55
Database :
OpenAIRE
Journal :
Journal of Physics D: Applied Physics
Accession number :
edsair.doi.dedup.....1a385d158647ae8bec9cd1f9c9dbbd1b
Full Text :
https://doi.org/10.1088/1361-6463/ac9a58