High-Speed-Operation of Compact All-Silicon Segmented Mach-Zehnder Modulator Integrated with Passive RC Equalizer for Optical DAC Transmitter

We experimentally demonstrated 70Gbaud PAM4 and 90Gbaud NRZ operations of all-silicon segmented modulator for optical DAC transmitter. Monolithic integration of MIM capacitor enabled broad EO bandwidth of 43.9GHz and small footprint of 300×60μm2.