Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field

Authors :: Hiroaki Nakarai
Tatsuya Yanagida
Kenichi Miyao
Kouichiro Kouge
Tsukasa Hori
Hakaru Mizoguchi
Shinji Nagai
Tamotsu Abe
Saito Takashi
Yoshifumi Ueno
Yukio Watanabe
Hideyuki Hayashi
Source :: Journal of Photopolymer Science and Technology. 33:37-44
Publication Year :: 2020
Publisher :: Technical Association of Photopolymers, Japan, 2020.

Subjects :: Light source
Optics
Materials science
Polymers and Plastics
business.industry
Extreme ultraviolet lithography
Organic Chemistry
Materials Chemistry
business
Power (physics)
Magnetic field

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