Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field

MLA

Hiroaki Nakarai, et al. “Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field.” Journal of Photopolymer Science and Technology, vol. 33, July 2020, pp. 37–44. EBSCOhost, https://doi.org/10.2494/photopolymer.33.37.

APA

Hiroaki Nakarai, Tatsuya Yanagida, Kenichi Miyao, Kouichiro Kouge, Tsukasa Hori, Hakaru Mizoguchi, Shinji Nagai, Tamotsu Abe, Saito Takashi, Yoshifumi Ueno, Yukio Watanabe, & Hideyuki Hayashi. (2020). Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field. Journal of Photopolymer Science and Technology, 33, 37–44. https://doi.org/10.2494/photopolymer.33.37

Chicago

Hiroaki Nakarai, Tatsuya Yanagida, Kenichi Miyao, Kouichiro Kouge, Tsukasa Hori, Hakaru Mizoguchi, Shinji Nagai, et al. 2020. “Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field.” Journal of Photopolymer Science and Technology 33 (July): 37–44. doi:10.2494/photopolymer.33.37.