LIDT improvement of multilayer coatings by accurate analysis of fabrication steps

We present Laser Induced Damage Threshold (LIDT) results on multilayer components with different optical functions for near infrared applications. In this paper, we investigate the different fabrication steps of such functions. In particular, we show experimental results on surface preparation (polishing, cleaning,) and on deposition techniques (Ion beam assisted process) related to the materials involved in coatings. Laser damage tests are performed at 1064-nm with a 5-ns pulse Nd:Yag laser and experiments are made at surfaces of optical components using a 12 μm diameter focused beam. Accurate damage probability curves are plotted thanks to a reliable statistical measurement of laser damage. Use of a statistical model permits to deduce the densities of laser damage precursors. A systematic analysis of all the steps involved in fabrication allows then to build multilayer components with high laser induced damage resistance.