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Dual-Mode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons
- Source :
- Sensors, Vol 18, Iss 2, p 343 (2018), Sensors; Volume 18; Issue 2; Pages: 343, Sensors (Basel, Switzerland)
- Publication Year :
- 2018
- Publisher :
- MDPI AG, 2018.
-
Abstract
- In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR FET sensor, and only a minor effect on the FBAR sensor. In this dual-mode system, qualitative discrimination can be achieved by analyzing polarity with the Si-NR FET and quantitative concentration information can be obtained using a polymer-coated FBAR with a detection limit at the ppm level. The complementary performance of the sensing elements provides higher analytical efficiency. Additionally, a dual mixture of two types of freons (CFC-113 and HCFC-141b) is further analyzed with the dual-mode gas sensor. Owing to the small size and complementary metal-oxide semiconductor (CMOS)-compatibility of the system, the dual-mode gas sensor shows potential as a portable integrated sensing system for the analysis of gas mixtures in the future.
- Subjects :
- Materials science
Silicon
chemistry.chemical_element
freons detection
bulk acoustic wave resonator
02 engineering and technology
lcsh:Chemical technology
01 natural sciences
Biochemistry
Article
Analytical Chemistry
gas sensor
Resonator
field effect transistor
lcsh:TP1-1185
Electrical and Electronic Engineering
Instrumentation
Polarity (mutual inductance)
Freon
business.industry
010401 analytical chemistry
dual-mode sensing
021001 nanoscience & nanotechnology
Atomic and Molecular Physics, and Optics
0104 chemical sciences
Semiconductor
CMOS
chemistry
Polar
Optoelectronics
Field-effect transistor
0210 nano-technology
business
Subjects
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 18
- Issue :
- 2
- Database :
- OpenAIRE
- Journal :
- Sensors
- Accession number :
- edsair.doi.dedup.....2f23d26f649283ec8627fcdc78187953