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Dual-Mode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons

Authors :
Ye Chang
Wei Pang
Xuexin Duan
Zhipeng Hui
Xiayu Wang
Hemi Qu
Source :
Sensors, Vol 18, Iss 2, p 343 (2018), Sensors; Volume 18; Issue 2; Pages: 343, Sensors (Basel, Switzerland)
Publication Year :
2018
Publisher :
MDPI AG, 2018.

Abstract

In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR FET sensor, and only a minor effect on the FBAR sensor. In this dual-mode system, qualitative discrimination can be achieved by analyzing polarity with the Si-NR FET and quantitative concentration information can be obtained using a polymer-coated FBAR with a detection limit at the ppm level. The complementary performance of the sensing elements provides higher analytical efficiency. Additionally, a dual mixture of two types of freons (CFC-113 and HCFC-141b) is further analyzed with the dual-mode gas sensor. Owing to the small size and complementary metal-oxide semiconductor (CMOS)-compatibility of the system, the dual-mode gas sensor shows potential as a portable integrated sensing system for the analysis of gas mixtures in the future.

Details

Language :
English
ISSN :
14248220
Volume :
18
Issue :
2
Database :
OpenAIRE
Journal :
Sensors
Accession number :
edsair.doi.dedup.....2f23d26f649283ec8627fcdc78187953