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An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process
- Source :
- Sensors, Vol 14, Iss 7, Pp 12735-12747 (2014), Sensors (Basel, Switzerland), Sensors; Volume 14; Issue 7; Pages: 12735-12747
- Publication Year :
- 2014
- Publisher :
- MDPI AG, 2014.
-
Abstract
- This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the α-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm.
- Subjects :
- Fabrication
Materials science
Oxide
Analytical chemistry
Ring oscillator
Electric Capacitance
lcsh:Chemical technology
Biochemistry
Capacitance
Ferric Compounds
acetone microsensor
α-Fe2O3
ring oscillator circuit
Article
Analytical Chemistry
Acetone
chemistry.chemical_compound
lcsh:TP1-1185
Electrical and Electronic Engineering
Instrumentation
Electrodes
Oxides
Equipment Design
Atomic and Molecular Physics, and Optics
chemistry
CMOS
Semiconductors
Electrode
Gases
Subjects
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 14
- Issue :
- 7
- Database :
- OpenAIRE
- Journal :
- Sensors
- Accession number :
- edsair.doi.dedup.....2f43c96575ee1c2f2298bd4d15f6295d