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Solution processed rare-earth doped high-k dielectrics for low-power IGZO transistors

Authors :
Xin-Hua Zhao
Jiaqing Zhuang
Qi-Jun Sun
Zhenhua Tang
Xin-Gui Tang
Vellaisamy A.L. Roy
Source :
Journal of Alloys and Compounds. 952:170062
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Details

ISSN :
09258388
Volume :
952
Database :
OpenAIRE
Journal :
Journal of Alloys and Compounds
Accession number :
edsair.doi.dedup.....32e38512d74f8b91cb207509df8125a5
Full Text :
https://doi.org/10.1016/j.jallcom.2023.170062