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Hydrogen Silsesquioxane-Based Nanofluidics
- Source :
- Advanced Materials Interfaces, Advanced Materials Interfaces, Wiley, 2017, 4 (7), pp.1601155. ⟨10.1002/admi.201601155⟩, Advanced Materials Interfaces, 2017, 4 (7), pp.1601155. ⟨10.1002/admi.201601155⟩
- Publication Year :
- 2017
- Publisher :
- HAL CCSD, 2017.
-
Abstract
- International audience; Nanofluidics show great promise for the control of small volumes and single molecules, especially for biological and energy applications. To build up more and more complex nanofluidics systems, a versatile and reproducible fabrication technique with nanometer precision alignment is desirable. In this article, two e-beam lithography methods to fabricate nanofluidic channels based on hydrogen silsesquioxane, a high-resolution negative-tone inorganic resist, are presented. The robustness and versatility of the fabrication processes are demonstrated on silicon, glass, and flexible substrates. The high precision ability is illustrated with nanometric alignment of nanofluidic channels on gold nanoparticles and nanotransistor sensors, as well as for 3D nanofluidics prototyping. Furthermore, an unexpected extremely slow water evaporation rate (≈1 week for 300 μm long nanochannels) is noticed. This feature enables a simple and reliable manipulation of nanofluidic chips for various studies.
- Subjects :
- [PHYS.PHYS.PHYS-FLU-DYN]Physics [physics]/Physics [physics]/Fluid Dynamics [physics.flu-dyn]
Materials science
Fabrication
Silicon
chemistry.chemical_element
Nanotechnology
Nanofluidics
02 engineering and technology
010402 general chemistry
01 natural sciences
chemistry.chemical_compound
HSQ
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Hydrogen silsesquioxane
Lithography
3D Nanofluidics
Mechanical Engineering
021001 nanoscience & nanotechnology
0104 chemical sciences
chemistry
Resist
Mechanics of Materials
Colloidal gold
extremely slow evaporation rate
Nanometre
0210 nano-technology
Subjects
Details
- Language :
- English
- ISSN :
- 21967350
- Database :
- OpenAIRE
- Journal :
- Advanced Materials Interfaces, Advanced Materials Interfaces, Wiley, 2017, 4 (7), pp.1601155. ⟨10.1002/admi.201601155⟩, Advanced Materials Interfaces, 2017, 4 (7), pp.1601155. ⟨10.1002/admi.201601155⟩
- Accession number :
- edsair.doi.dedup.....34197c82af570bed7e8a0d259f1cfe0a