Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate

We report on the design, implementation and characterisation of a thick-film gas sensor deposited for the first time by screen-printing technique onto a micromachined hotplate, the microheater maintains a film temperature as high as 400°C with 2 was achieved by computer-aided screen-printing. The films were then fired through the microheater itself to guarantee thermodynamic stability for long time exploitation. The response of the device to CO, CH 4 and NO 2 at concentrations typical for indoor and outdoor applications was recorded by measuring the film resistance through ultra high impedance CMOS circuit.