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MEPHISTO spectromicroscope reaches 20 nm lateral resolution

Authors :
Benjamin Gilbert
P. Perfetti
Gelsomina De Stasio
M. Capozi
Luca Perfetti
Brian P. Tonner
O. Fauchoux
Giorgio Margaritondo

Abstract

The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope a Emission de PHotoelectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance. (C) 1999 American Institute of Physics. [S0034-6748(99)04902-3].

Subjects

Subjects :
Materials science
Microscope
business.industry
SURFACES
Resolution (electron density)
Synchrotron radiation
MICROSCOPY
Lateral resolution
Photoelectric effect
Synchrotron
law.invention
Optics
Nuclear magnetic resonance
X-ray photoelectron spectroscopy
law
Microscopy
SYNCHROTRON RADIATION
business
Instrumentation

Details

ISSN :
00346748
Database :
OpenAIRE
Accession number :
edsair.doi.dedup.....38d55c0a24b60709c62e8df9e552b01d

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